Rubi3
①12”涂胶显影机。
②Si or Glass， SOC， SOD，Polymide coating and develop ，inline模式。
②Si or Glass， SOC， SOD，Polymide coating and develop ，inline模式。
| wafer sizes | 300mm | 12 |
| Max number of load port | 4 | |
| Max mumber of spinners | 8 | [根操产能需求适配] |
| Max number of thermal modules | 24 | [根操产能需求适配] |
| Process | Iline, KrF ArF,PI | |
| Substrates | Si/SiC/glass | |
| T&H control | Temperature = 23±01℃ Relatively Humidity = 45±19% |
[依客户定制] |
| PR PUMP SPEC | PRYIscoslty Dispense Volume Range |
[MAX 10,000cp] [0.5cc ~ 8.0cc(≤200cp)] [1.0cc ~ 10.0cc(200 - 10,000cp)] |
| spin motor spec | Spinning speed range:0,10-6000rpm Acceleration range:100-10000rpm/s accuracy:±1rpm |
|
| COT | max pr nozzles EBR accuracy BSR(2 set per CUP) RRC PR/EBR SUCK BACK Cup Wash |
[G] [1.0~10.0mm±0.2mm] |
| DEV | DEV nozzle type RINSE BSR(2 set per CUP) |
[H,SH,LD,STREAM,GP] |
